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<title lang=en>Trends in dopant incorporation for 3C-SiC thin films on silicon. Proceedings of the 6th European Conference on Silicon Carbide and Related Materials</title>
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<creator>Portail, M.</creator>
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<contributor>Géosciences Montpellier ; Université des Antilles et de la Guyane (UAG) - Institut national des sciences de l'Univers (INSU - CNRS) - Université de Montpellier (UM) - Centre National de la Recherche Scientifique (CNRS)</contributor>
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